[16p-B2-1~14] 15.8 Crystal evaluation, nanoimpurities and crystal defects

[16p-B2-7] Room-temperature infrared absorption at 1206 cm-1 by substitutional carbon in crystalline silicon and anharmonic local vibration

^○Hiroshi Kaneta¹, Haruhiko Ono² (Kyushu Inst. of Technology¹, Kanagawa Industrial Technology Cent.²)

Keywords:シリコン,炭素不純物,赤外吸収