[16p-B3-1~10] 17.1 Growth technology

[16p-B3-3] Analysis of CNT film grown by Slope control of temperature profile [STEP]

^○Akio Kawabata¹, Tomo Murakami¹, Mizuhisa Nihei¹, Naoki Yokoyama¹ (AIST GNC¹)

Keywords:カーボンナノチューブ,排熱,Thermal Interface Material