Investigation of thermal stability of β-Ga<sub>2</sub>O<sub>3</sub>(010) substrate surface at high temperatures

Takahiro Fukizawa

Presentation information

Oral presentation

Joint session K » Joint session K

[16p-B4-1~8] Joint session K

Mon. Sep 16, 2013 4:00 PM - 6:00 PM B4 (TC2 1F-106)

4:15 PM - 4:30 PM

[16p-B4-2] Investigation of thermal stability of β-Ga₂O₃(010) substrate surface at high temperatures

^○Takahiro Fukizawa¹, Chihiro Eguchi¹, Shoko Hanagata¹, Kazushiro Nomura¹, Ken Goto², Rie Togashi¹, Hisashi Murakami¹, Akito Kuramata², Yoshinao Kumagai¹, Akinori Koukitu¹ (Tokyo Univ. of Agri. & Tech¹, Tamura Co. Ltd.²)

Keywords:Ga2O3,酸化ガリウム

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Presentation information

[16p-B4-1~8] Joint session K

[16p-B4-2] Investigation of thermal stability of β-Ga2O3(010) substrate surface at high temperatures

[16p-B4-2] Investigation of thermal stability of β-Ga₂O₃(010) substrate surface at high temperatures