[16p-B4-1~8] Joint session K

△ [16p-B4-7] Study of zinc source applied to proposed new plasma processing

^○Naruhiro Mizuike¹, Haruhiko Himura¹, Shigefumi Okada², Akio Sanpei¹, Sadao Masamune¹ (Kyoto Inst. Tech.¹, Osaka Univ., Professor of Emeritus²)

Keywords:粒子供給,酸化亜鉛,真空