The 74th JSAP Autumn Meeting,2013

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Oral presentation

06. Thin Films and Surfaces » 6.3 Oxide-based electronics

[16p-D3-1~13] 6.3 Oxide-based electronics

Mon. Sep 16, 2013 2:30 PM - 6:00 PM D3 (MK 2F-201)

5:30 PM - 5:45 PM

[16p-D3-12] Development of Selector Cell for 3D Cross-point ReRAM Prepared by Sputtering

○Natsuki Fukuda1, Kazunori Fukuju1, Mitsutaka Hirose1, Isao Kimura1, Yutaka Nishioka1, Koukou Suu1 (ULVAC, Inc.1)

Keywords:ReRAM,セレクター,スパッタリング