3:00 PM - 3:15 PM
[16p-D3-3] Low-temperature growth of VO2 thin films and substrate incident ion energy analysis in ICP-assisted sputtering method
Keywords:イオンエネルギー分析,二酸化バナジウム,低温成長
Presentation information
Oral presentation
06. Thin Films and Surfaces » 6.3 Oxide-based electronics
[16p-D3-1~13] 6.3 Oxide-based electronics
Mon. Sep 16, 2013 2:30 PM - 6:00 PM D3 (MK 2F-201)