3:30 PM - 3:45 PM
[16p-D3-5] Electrical properties of VO2 thin films deposited by reactive sputtering and the conductive type inversion caused by post-annealing
Keywords:二酸化バナジウム,電気的特性,ポストアニール
Oral presentation
06. Thin Films and Surfaces » 6.3 Oxide-based electronics
Mon. Sep 16, 2013 2:30 PM - 6:00 PM D3 (MK 2F-201)
3:30 PM - 3:45 PM
Keywords:二酸化バナジウム,電気的特性,ポストアニール