The 74th JSAP Autumn Meeting,2013

Presentation information

Oral presentation

06. Thin Films and Surfaces » 6.3 Oxide-based electronics

[16p-D3-1~13] 6.3 Oxide-based electronics

Mon. Sep 16, 2013 2:30 PM - 6:00 PM D3 (MK 2F-201)

3:30 PM - 3:45 PM

[16p-D3-5] Electrical properties of VO2 thin films deposited by reactive sputtering and the conductive type inversion caused by post-annealing

BintiAzhan NurulHanis1, Kunio Okimura1 (Tokai Univ.1)

Keywords:二酸化バナジウム,電気的特性,ポストアニール