[16p-P7-1~52] 17 Nanocarbon Technology(poster)

[16p-P7-8] Graphene grown on ion-implanted 4H-SiC and an effect of pre-plasma treatment

^○(M2)Toru Sugimachi¹, Daiki Aoyagi¹, Tomoaki Nishimura², Tohru Nakamura¹ (Hosei Univ.¹, Research Center of Ion Beam Technology, Hosei Univ.²)

Keywords:グラフェン,SiC,プラズマ処理