[16p-P8-1~21] Joint session K

[16p-P8-6] Examination of Relation between AZO Targets and Thin Films Deposited by Sputtering Method

^○Katsuki Kondou¹, Yuusuke Tomiguchi¹, Yuusuke Hara¹, Hidehiko Shimizu¹, Haruo Iwano¹, Takahiro Kawakami¹, Yasuo Fukushima¹, Koutarou Nagata¹, Nozomu Tsuboi¹, Takahiro Nomoto¹ (Niigata Univ.¹)

Keywords:AZO,スパッタ法