Surface Structural Change of Ti-doped DLC Films by Hyperthermal Atomic Oxygen Exposure

Kengo Kidena

Presentation information

Oral presentation

07. Beam Technology and Nanofabrication » 7.5 Particle/photon-beam-induced surface reactions

[17a-A13-1~10] 7.5 Particle/photon-beam-induced surface reactions

Tue. Sep 17, 2013 9:00 AM - 12:15 PM A13 (TC1 3F-323)

12:00 PM - 12:15 PM

△ [17a-A13-10] Surface Structural Change of Ti-doped DLC Films by Hyperthermal Atomic Oxygen Exposure

^○Kengo Kidena¹, Minami Endo¹, Ryo Imai¹, Masahito Niibe¹, Kumiko Yokota², Masahito Tagawa², Yuichi Furuyama³, Kazuhiro Kanda¹ (LASTI, Univ. of Hyogo¹, Graduate School of Eng., Kobe Univ.², Graduate School of Maritime Sci., Kobe Univ.³)

Keywords:原子状酸素ビーム,ダイヤモンドライクカーボン膜,X線吸収分光