The 74th JSAP Autumn Meeting,2013

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07. Beam Technology and Nanofabrication » 7.5 Particle/photon-beam-induced surface reactions

[17a-A13-1~10] 7.5 Particle/photon-beam-induced surface reactions

Tue. Sep 17, 2013 9:00 AM - 12:15 PM A13 (TC1 3F-323)

11:45 AM - 12:00 PM

△ [17a-A13-9] Effect of the Irradiation of Atomic Oxygen to Si-DLC Films

○Minami Endo1, Kengo Kidena1, Ryo Imai1, Masahito Niibe1, Kumiko Yokota2, Masahito Tagawa2, Yuichi Furuyama3, Kazuhiro Kanda1 (LASTI, Univ. of Hyogo1, Graduate School of Eng., Kobe Univ2, Graduate School of Maritime Sci., Kobe Univ.3)

Keywords:原子状酸素ビーム,ダイヤモンドライクカーボン膜,X線吸収分光