The 74th JSAP Autumn Meeting,2013

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Oral presentation

07. Beam Technology and Nanofabrication » 7.5 Particle/photon-beam-induced surface reactions

[17a-A13-1~10] 7.5 Particle/photon-beam-induced surface reactions

Tue. Sep 17, 2013 9:00 AM - 12:15 PM A13 (TC1 3F-323)

10:45 AM - 11:00 AM

[17a-A13-5] Surface modification of DLC Films With Gas Cluster Ion Beam

○(M2)Akihiro Fujimoto1, Noriaki Toyoda1, Isao Yamada1 (Grad. school of eng., Univ of Hyogo.1)

Keywords:ガスクラスターイオンビーム,DLC