Recovery of Etching Damage by Soft X-ray or Ultraviolet Irradiation Observed in Ti-L2,3 XAS Spectra of TiO2 Thin Films

Presentation information

Oral presentation

07. Beam Technology and Nanofabrication » 7.5 Particle/photon-beam-induced surface reactions

Tue. Sep 17, 2013 9:00 AM - 12:15 PM A13 (TC1 3F-323)

11:00 AM - 11:15 AM

^○Masahito Niibe¹, Keiji Sano¹, Retsuo Kawakami², Kikuo Tominaga², Yoshitaka Nakano³ (LASTI, Univ. Hyogo¹, Univ. Tokushima², Chubu Univ.³)

Keywords:酸化チタン,軟Ｘ線,エッチングダメージ