The 74th JSAP Autumn Meeting,2013

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Oral presentation

04. Quantum Electronics » 4.7 Laser processing

[17a-A3-1~10] 4.7 Laser processing

Tue. Sep 17, 2013 9:30 AM - 12:15 PM A3 (TC1 1F-132)

11:15 AM - 11:30 AM

△ [17a-A3-7] Fubrication of DLC films by PLD of a frozen cyclohexane target.

○Yuki Wagatsuma1, Takahiro Nakamura1, Shunichi Sato1 (Tohoku Univ1)

Keywords:PLD法,冷凍ターゲット,DLC薄膜