[17a-A3-1~10] 4.7 Laser processing

△ [17a-A3-8] Direct micromachining inside c-Si by using femtosecond laser

^○Masahiro Mori¹, Yasuhiko Shimotsuma¹, Masaaki Sakakura², Kiyotaka Miura¹ (Kyoto Univ.¹, Kyoto Univ. Saci²)

Keywords:フェムト秒レーザー,単結晶シリコン,ナノ周期構造