[17a-B1-1~11] 17.1 Growth technology

△ [17a-B1-1] Characterization of the Electrical Properties and Raman Mapping for Graphene Films Deposited by Microwave Plasma-CVD

^○Yuki Okigawa^1,2, Ryuichi Kato², Masahiro Tani², Takatoshi Yamada^1,2, Masatou Ishihara^1,2, Masataka Hasegawa^1,2 (AIST¹, TASC²)

Keywords:グラフェン,プラズマCVD,移動度