[17a-B3-1~11] 15.6 IV-group-based compounds

[17a-B3-10] Theoretical Studies on NO Initial Oxidation Process of 4H-SiC Surfaces

^○Kentaro Endo¹, Syotaro Maruyama¹, Shigenori Kato¹, Katsumasa Kamiya¹, Kenji Shiraishi^1,2 (Univ. of Tsukuba¹, Nagoya Univ²)

Keywords:炭化ケイ素,酸化,第一原理計算