The 74th JSAP Autumn Meeting,2013

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Oral presentation

15. Crystal Engineering » 15.6 IV-group-based compounds

[17a-B3-1~11] 15.6 IV-group-based compounds

Tue. Sep 17, 2013 9:00 AM - 12:00 PM B3 (TC2 1F-105)

10:00 AM - 10:15 AM

△ [17a-B3-5] Effects of crystal face and oxidation atmosphere on thermal oxide structure near the 4H-SiC interface

○Hirohisa Hirai1, Koji Kita1,2 (Univ. of Tokyo1, JST-PRESTO2)

Keywords:SiC,FTIR,熱酸化膜