The 74th JSAP Autumn Meeting,2013

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Oral presentation

13. Semiconductors A (Silicon) » 13.3 Insulator technology

[17a-B5-1~10] 13.3 Insulator technology

Tue. Sep 17, 2013 9:15 AM - 12:00 PM B5 (TC2 2F-201)

9:45 AM - 10:00 AM

△ [17a-B5-3] Forming SiO2 thin Film by CO2 laser Annealing of Spin-On Glass on Polycrystalline Silicon Thin Film

○Daisuke Hishitani1, Masahiro Horita1,2, Yasuaki Ishikawa1,2, Yosuke Watanabe3, Hiroshi Ikenoue3, Yukiharu Uraoka1,2 (NAIST1, CREST2, Kyushu univ.3)

Keywords:Spin-On glass,CO2 laser,SiO2