The 74th JSAP Autumn Meeting,2013

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Oral presentation

13. Semiconductors A (Silicon) » 13.3 Insulator technology

[17a-B5-1~10] 13.3 Insulator technology

Tue. Sep 17, 2013 9:15 AM - 12:00 PM B5 (TC2 2F-201)

11:00 AM - 11:15 AM

△ [17a-B5-7] MONOS-specific interface-state generation/recovery mechanisms related to above stacked SiN layer

○Shosuke Fujii1, Kiwamu Sakuma1 (Toshiba1)

Keywords:MONOS,信頼性,界面準位