10:15 AM - 10:30 AM
[17a-C1-3] Formation of ZnO Thin Films with Textured Structure by Plasma-Assisted Mist CVD
Keywords:酸化亜鉛、ミストCVD
Presentation information
Oral presentation
08. Plasma Electronics » 8.3 Plasma deposition of thin film and surface treatment
[17a-C1-1~8] 8.3 Plasma deposition of thin film and surface treatment
Tue. Sep 17, 2013 9:45 AM - 11:45 AM C1 (TC3 1F-101)