The 74th JSAP Autumn Meeting,2013

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Oral presentation

08. Plasma Electronics » 8.4 Plasma etching

[17a-C2-1~10] 8.4 Plasma etching

Tue. Sep 17, 2013 9:15 AM - 11:45 AM C2 (TC3 1F-102)

10:45 AM - 11:00 AM

[17a-C2-6] Quicker Stabilization of CD Drift after Maintenance

○Kousa Hirota1, Takeshi Omori1, Nobuyuki Negishi1 (Central Research Laboratory, Hitachi, Ltd.1)

Keywords:Etching,CD Drift