[17a-P11-1~11] 3.4 Optical measurement

[17a-P11-10] Transmission type of spectroscopic Mueller matrix polarimeter for nano-structure evaluation

^○(M1)Yo Kamata¹, Jun-ichiro Sugisaka^1,2, Yukitoshi Otani¹, Toyohiko Yatagai¹ (CORE,Utsunomiya University¹, Kitami Institute of Technology²)

Keywords:偏光計測,スキャトロメトリ