9:30 AM - 11:30 AM
[17a-P15-1] Decomposition reaction of tetramethylsilane with RF plasma of Ar
Keywords:水素化アモルファス炭化ケイ素膜,プラズマCVD
Presentation information
Poster presentation
06. Thin Films and Surfaces » 6.2 Carbon-based thin films
[17a-P15-1~9] 6.2 Carbon-based thin films
Tue. Sep 17, 2013 9:30 AM - 11:30 AM P15 (Davis Memorial Auditorium)