9:30 AM - 11:30 AM
[17a-P15-2] Observation of free radicals in the microwave discharge flow C6H6/N2 gas mixture
Keywords:水素化アモルファス窒化炭素膜,プラズマCVD
Presentation information
Poster presentation
06. Thin Films and Surfaces » 6.2 Carbon-based thin films
[17a-P15-1~9] 6.2 Carbon-based thin films
Tue. Sep 17, 2013 9:30 AM - 11:30 AM P15 (Davis Memorial Auditorium)