The debunching mechanism of macro-step bunching on 4H-SiC(0001) surface

Presentation information

Oral presentation

15. Crystal Engineering » 15.6 IV-group-based compounds

Tue. Sep 17, 2013 1:30 PM - 6:00 PM B3 (TC2 1F-105)

4:45 PM - 5:00 PM

^○(M1)Hideki Shimizu¹, Yasunori Kutsuma¹, Kouji Ashida¹, Noboru Ohtani¹, Tadaaki Kaneko¹ (Kwansei Gakuin Univ.¹)

Keywords:SiC,Etching,debunching