The 74th JSAP Autumn Meeting,2013

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Oral presentation

Joint session K » Joint session K

[17p-B4-1~18] Joint session K

Tue. Sep 17, 2013 1:30 PM - 6:15 PM B4 (TC2 1F-106)

4:45 PM - 5:00 PM

△ [17p-B4-13] Effect of Low Temperature Hydrogen Annealing in Amorphous-InGaZnO TFT

○Yoshihiro Ueoka1, Yasuaki Ishikawa1, Bermundo Juan Paolo1, Haruka Yamazaki1, Satoshi Urakawa1, Yukihiro Osada1, Masahiro Horita1, Yukiharu Uraoka1 (Nara Inst. of Sci. and Tech.1)

Keywords:IGZO,TFT,水素