The 74th JSAP Autumn Meeting,2013

Presentation information

Oral presentation

Joint session K » Joint session K

[17p-B4-1~18] Joint session K

Tue. Sep 17, 2013 1:30 PM - 6:15 PM B4 (TC2 1F-106)

5:00 PM - 5:15 PM

[17p-B4-14] Dependency of process condition in IGZO TFT Reliability

Ju Saka1, Lijin Shou1, Fumito Otake1, Akira Taki1, Masanori Shirai1, Tomiyuki Yukawa1, Masaki Takei1, Junya Kiyota1, Satoru Ishibashi1, Kazuya Saito1 (ULVAC Inc,1)

Keywords:IGZO,TFT,半導体