[17p-B4-1~18] Joint session K

[17p-B4-7] Effects of RF-superimposed DC magnetron sputtering on the properties of highly transparent conductive Al-doped ZnO films

^○Junichi Nomoto¹, Huaping Song¹, Hisao Makino¹, Seiichi Kishimoto^1,2, Tetsuya Yamamoto¹ (Research Inst. Kochi Univ. Tech¹, Kochi National College of Tech.²)

Keywords:透明導電膜,ZnO