[17p-C11-5~6] Plasma Electronics Award Speech

[17p-C11-5] [Plasma Electronics Award Speech](30 min.) Surface Oxidation of Si Enhanced by Energetic Hydrogen Ion Incidence

tomoko ito¹, kohei mizotani¹, michiro isobe¹, kazuhiro karahashi¹, masanaga fukasawa², kazunori nagahata², tatsuya tatsumi², ^○satoshi hamaguchi¹ (Osaka University¹, SONY Corporation²)

Keywords:プラズマエッチング,増速酸化,表面ダメージ