The 74th JSAP Autumn Meeting,2013

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Oral presentation

03. Optics » 3.4 Optical measurement

[17p-C13-1~14] 3.4 Optical measurement

Tue. Sep 17, 2013 1:30 PM - 5:15 PM C13 (TC3 2F-214)

2:30 PM - 2:45 PM

[17p-C13-5] Dispersion Models of Optical Constants in SWIR Band for Reflection Spectroscopic Thickness Meter of Silicon Wafers

○Teppei Onuki1, Ryusuke Ono1, Shusuke Yanagimachi1, Hirotaka Ojima1, Jun Shimizu1, Libo Zhou1 (Ibaraki Univ.1)

Keywords:薄ウェハ厚さ計