[17p-D1-1~18] 6.2 Carbon-based thin films

[17p-D1-1] Film Thickness Control of Super DLC Films by In-situ Monitoring of Film Reflection

Michinari Hosoo¹, ^○Hideto Tanoue¹, Yoshiyuki Suda¹, Hirofumi Takikawa¹, Masao Kamiya², Makoto Taki³, Yushi Hasegawa³, Nobuhiro Tsuji³, Abusuilik Saleh⁴ (Toyohashi Univ. Technol¹, Itoh Opt. Ind. Co., Ltd.², Onward Ceramic Coating Co., Ltd.³, Hitachi Tool Eng., Ltd.⁴)

Keywords:ダイヤモンドライクカーボン,真空アーク蒸着法,膜厚制御