[17p-D1-1~18] 6.2 Carbon-based thin films

[17p-D1-6] Characterizations wavelength dependence of refractive index and extinction coefficient of hydrogenated amorphous carbon films by spectroscopic ellipsometry

^○Satoru Arakawa¹, Hisashi Yoshioka¹, Kazuya Mizuguchi¹, Shigeo Ohshio¹, Keiji Komatsu¹, Ikumi Toda¹, Hiroyuki Muramatsu¹, Hidetoshi Saitoh¹ (Nagaoka Univ. Tech.¹)

Keywords:水素化アモルファス炭素膜,屈折率,消光係数