[17p-D1-1~18] 6.2 Carbon-based thin films

[17p-D1-9] Water elimination from chemical vapor deposition process of hydrogenated amorphous carbon films

^○Xiaolong Zhou¹, Keiji Komatsu¹, Ikumi Toda¹, Shigeo Ohshio¹, Hiroyuki Muramatsu¹, Hidetoshi Saitoh¹ (Nagaoka Univ. Tech.¹)

Keywords:水素化アモルファス炭素膜,化学気祖析出過程,水除去