Study on large area of silicon thin film by plasma CVD using multiple impinging jets

Presentation information

Poster presentation

08. Plasma Electronics » 8 Plasma Electronics(poster)

Tue. Sep 17, 2013 1:30 PM - 3:30 PM P2 (Davis Memorial Auditorium)

1:30 PM - 3:30 PM

^○naoya kaneda¹, satosi nisida¹, kouji muta¹, sizuma kuribayashi¹ (gihudaigakudaigakuinkou¹)

Keywords:衝突噴流