Carbon nitride films synthesized by dual microwave plasma source CVD

Presentation information

Poster presentation

08. Plasma Electronics » 8 Plasma Electronics(poster)

Tue. Sep 17, 2013 1:30 PM - 3:30 PM P2 (Davis Memorial Auditorium)

1:30 PM - 3:30 PM

^○(M2)Osamu Ikai¹, Takayoshi Kiguchi², Maria Bratescu³, Nagahiro Saito^1,2,3 (Nagoya Univ.¹, Nagoya Univ. Gremo², Nagoya Univ. Ecotopia³)

Keywords:窒化炭素,マイクロ波