[17p-P7-1~15] 15.4 III-V-group nitride crystals

[17p-P7-1] Dependence on the supply rate of BCl₃ for the growth of hexagonal boron nitride films on sapphire substrates by high-temperature chemical vapor deposition

^○HYEYOUNG LEE¹, Naoki Umehara¹, Iori Kuwahara¹, Tetsuya Kouno¹, Hiroko Kominami¹, Youichirou Nakanishi¹, Kazuhiko Hara^1,2 (Shizuoka Univ.¹, Shizuoka Univ.²)

Keywords:六方晶窒化ホウ素