The 74th JSAP Autumn Meeting,2013

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Poster presentation

15. Crystal Engineering » 15.5 IV-group crystals and IV-IV-group mixed crystals

[17p-P8-1~7] 15.5 IV-group crystals and IV-IV-group mixed crystals

Tue. Sep 17, 2013 1:30 PM - 3:30 PM P8 (Davis Memorial Auditorium)

1:30 PM - 3:30 PM

[17p-P8-1] Effect of annealing of p-DCFET SiGe channel layer on strain

○Takehiko Sakurazawa1, Yoshiyuki Suda1, Takahiro Tsukamoto1 (Tokyo Univ. of Agric. & Technol.1)

Keywords:歪み