[17p-P8-1~7] 15.5 IV-group crystals and IV-IV-group mixed crystals

△ [17p-P8-6] Fabrication of SiGe Single Crystal Thick Film by Infrared Convergent Heating Furnace

^○(M1C)Masanori Tsuchiya¹, Masanori Nagao¹, Satoshi Watachi¹, Isao Tanaka¹ (Univ. of Yamanashi¹)

Keywords:SiGe,厚膜,赤外線集中加熱炉