[17p-P8-1~7] 15.5 IV-group crystals and IV-IV-group mixed crystals

[17p-P8-7] The observation of threading edge dislocation related surface step-terrace structures of 4H-SiC(0001) by Scanning Electron Microscopy

^○Tomonori Kajino¹, Yasunori Kutsuma¹, Kouji Ashida¹, Noboru Ohtani¹, Tadaaki Kaneko¹ (Kwangaku Univ.¹)

Keywords:SiC,dislocation,SEM