[18a-B3-1~9] 15.6 IV-group-based compounds

[18a-B3-5] Raman investigation for subsurface damage induced by scratching test using diamond and SiC scratchers

Takeshi Mitani^1,2, ^○Masaru Tomobe², Shin-ichi Nakashima², Tomohisa Kato^1,2, Hajime Okumura^1,2 (FUPET¹, AIST²)

Keywords:raman,SiC