[18a-C2-1~8] 8.4 Plasma etching

[18a-C2-6] Real-time / in-situ electron spin resonance analysis of plasma surface interactions (5)

^○(M2)Haoran Wang¹, Kenji Ishikawa¹, Hideo Horibe², Keigo Takeda¹, Hiroki Kondo¹, Makoto Sekine¹, Masaru Hori¹ (Nagoya Univ.¹, Kanazawa Inst. Technol.²)

Keywords:プラズマ,ESR