[18a-D6-1~9] 14.2 Ultrathin films and quantum nanostructures

▲ [18a-D6-7] GaAs surface investigation for high density quantum nanodisk array with a bio-template top-down process

^○Cédric Thomas^1,3, Yosuke Tamura^1,3, Akio Higo², Takeru Okada¹, Naofumi Okamoto⁴, Yamashita Ichiro⁴, Seiji Samukawa^1,2,3 (IFS, Tohoku Univ.¹, WPI-AIMR, Tohoku Univ.², JST-CREST³, NAIST⁴)

Keywords:量子ドット,中性粒子ビームエッチング,表面酸化膜除去