[18a-D6-1~9] 14.2 Ultrathin films and quantum nanostructures

[18a-D6-9] The Fabrication of GaAs Quantum Nanodisk Combination of Bio-template and Neutral Beam Etching and Improvement of PL Emission

^○Akio Higo¹, Yosuke Tamura^2,7, Takayuki Kiba^3,7, Cédric Thomas^2,7, Yunpeng Wang⁴, Ichiro Yamashita^5,7, Masakazu Sugiyama⁶, Yoshiaki Nakano^4,6, Akihiro Murayama^3,7, Seiji Samukawa^1,2,7 (WPI-AIMR, Tohoku Univ.¹, IFS, Tohoku Univ.², IST, Hokkaido Univ.³, RCAST, Uinv. of Tokyo⁴, NAIST⁵, School of Eng., Univ. of Tokyo⁶, JST-CREST⁷)

Keywords:中性粒子ビームエッチング,量子ドットレーザー,有機金属気相成長法