[18p-A4-1~18] 16.3 Bulk, thin-film and other silicon-based solar cells

[18p-A4-6] Comparison of growth process in a-SiC:H with that in a-SiO:H

^○Shinnosuke Kakimoto¹, Ryoji Okumoto¹, Yasushi Sobajima^1,2, Chitose Sada^1,2, Akihisa Matsuda^1,2, Hiroaki Okamoto^1,2 (Grad. School of Eng. Sci., Osaka Univ.¹, JST-CREST.²)

Keywords:アモルファスシリコンカーバイド