5:45 PM - 6:15 PM
[18p-C5-8] HiPIMS-The future of materials processing created by high density metal plasma
Keywords:プラズマ,スパッタリング,薄膜
Presentation information
Symposium
Symposium planned by Program Committee » Possibilities of reactive deposition process by high power impulse magnetron sputtering
[18p-C5-1~8] Possibilities of reactive deposition process by high power impulse magnetron sputtering
Wed. Sep 18, 2013 2:00 PM - 6:15 PM C5 (TC3 1F-115)