The 74th JSAP Autumn Meeting,2013

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Oral presentation

06. Thin Films and Surfaces » 6.2 Carbon-based thin films

[18p-D1-1~17] 6.2 Carbon-based thin films

Wed. Sep 18, 2013 1:00 PM - 5:45 PM D1 (MK 1F-101)

4:45 PM - 5:00 PM

[18p-D1-14] Characterization of N-doped DLC thin films prepared by the thermal decomposition method

○Yuma Murata1, Katsumi Tanaka1, Ono Hiroshi1, Cheow-Keong Choo1, Yutaka Nagai1 (Electro-Communications Univ.1)

Keywords:DLC,Amorphous carbon,窒素ドープ