The 74th JSAP Autumn Meeting,2013

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Oral presentation

06. Thin Films and Surfaces » 6.2 Carbon-based thin films

[18p-D1-1~17] 6.2 Carbon-based thin films

Wed. Sep 18, 2013 1:00 PM - 5:45 PM D1 (MK 1F-101)

5:30 PM - 5:45 PM

[18p-D1-17] Decomposition of C2H2 in the microwave discharge flow of N2 : Observation of free radicals by laser spectroscopy

○Hiroki Tsudome1, Haruhiko Ito1 (Nagaoka Univ.1)

Keywords:水素化アモルファス窒化炭素膜,プラズマCVD