The 74th JSAP Autumn Meeting,2013

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13. Semiconductors A (Silicon) » 13.6 Silicon devices / Integration technology

[18p-P10-1~13] 13.6 Silicon devices / Integration technology

Wed. Sep 18, 2013 1:30 PM - 3:30 PM P10 (Davis Memorial Auditorium)

1:30 PM - 3:30 PM

[18p-P10-10] Investigation of Traps in Insulator Films of MOSFET by Means of Isochronal Annealing Techniques

○Ichiro Yamakawa1, Yoshiki Yonamoto1 (YRL, Hitachi, Ltd.1)

Keywords:MOSFET,絶縁膜,トラップ