[18p-P10-1~13] 13.6 Silicon devices / Integration technology

[18p-P10-8] BSIM4 Parameter Extraction for Tri-gate Si Nanowire Transistors

^○Chika Tanaka¹, Masumi Saitoh¹, Kensuke Ota¹, Toshinori Numata¹, Daisuke Matsushita¹ (Corporate R&D Center, Toshiba Corporation¹)

Keywords:parameter extraction